Zero Detect! Never Stop!
EBARA F-REX300S2
New Material CMP Head Assembly
Korea Patent No : 1020140066002
IPC : H01L 21/304 B24B 37/32
PCT International: PCT/KR2015/004157
Taiwan Patent : 104115452
ONE BODY!
SIMPLE OPERATION!
Weight : 8700g ±30g (Ceramic : 8670g ±30g)
No Crack!
No Broken!
Long Life Time!
Increase the H/W & Process Reliability
EBARA F-REX300S2
Introduction for CMP Head Assembly
Ceramic Head Repair
Korea Patent No : 1020130112513, 1020140057128
No Crack, Long Life Time!
Comparison of a Property of matter classified by application
Every material was developed for semiconductor/LCD process that can used for the part of product which is superior to prevent its modifying, corrosion and bending
|
NO |
Property of Matter |
Ceramic |
SUS316 |
New Material |
|---|---|---|---|---|
| 1 | Specific gravity |
3.96 |
7.98 |
4.0 |
| 2 | melting point (℃) |
1,600 |
1,400 |
1,800 |
| 7 | coefficient of expansion ( /℃ x 10E-6) |
8 |
16 |
8.0 |
| 8 | tensile strength( M㎩) |
59 |
380 |
|
| 11 | Brinell hardness (HV) |
150 |
180 |
