EBARA CMP HEAD

Semiconductor spare parts

SEMI ALLIANCE


EBARA F-REX300S2

New Material CMP Head Assembly


Korea Patent No : 1020140066002

IPC : H01L 21/304 B24B 37/32

PCT International: PCT/KR2015/004157

Taiwan Patent : 104115452


ONE BODY!

SIMPLE OPERATION!

Weight : 8700g ±30g (Ceramic : 8670g ±30g)

No Crack!

No Broken!

Long Life Time!

Increase the H/W & Process Reliability

EBARA F-REX300S2

Introduction for CMP Head Assembly


Ceramic Head Repair

Korea Patent No : 1020130112513, 1020140057128

No Crack, Long Life Time!

Comparison of a Property of matter classified by application

Every material was developed for semiconductor/LCD process that can used for the part of product which is superior to prevent its modifying,  corrosion and bending

제작 상세내용 및 비용안내

NO

Property of Matter

Ceramic

SUS316

New Material

1

Specific gravity

3.96

7.98

4.0

2

melting point (℃)

1,600

1,400

1,800

7

coefficient of expansion ( /℃ x 10E-6)

8

16

8.0

8

tensile strength( M㎩)

59

380

11

Brinell hardness (HV)

150

180